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innovation.IM onto NEWS RELEASE Onto Innovation Reports 2021 Fourth Quarter and Full Year Results 2/8/2022 Record quarterly revenue of $ 226 million exceeds guidance , resulting in 45 % year - over - year growth Continued incremental revenue growth forecasted for the first quarter of 2022 WILMINGTON , Mass .-- ( BUSINESS WIRE ) -- Onto Innovation Inc. ( NYSE : ONTO ) ( " Onto Innovation , " " Onto , " or the " Company " ) today announced financial results for the fourth quarter and full year results for 2021 . 2021 Fourth Quarter and Full Year Financial Highlights • . Record full year capital equipment revenue of $ 634 million grew 49 % year - over - year . Quarterly gross profit margin improved to 55 % from 49 % in the same period last year . Fourth quarter operating margin improved to 22 % GAAP and 31 % non - GAAP , in line with the Company's long- term operating model . Quarterly diluted earnings per share of $ 0.94 increased 135 % year - over - year and non - GAAP diluted earnings per share of $ 1.23 increased 71 % year - over - year . • Full year GAAP net income increased 350 % and non - GAAP net income doubled year - over - year . • Record cash flow from operations for 2021 totaled $ 175 million , or 22 % of revenue . 2021 Fourth Quarter and Full Year Business Highlights • Full year revenue for AtlasⓇ stand - alone metrology increased 56 % over the prior year . • Integrated metrology revenue in 2021 grew 46 % over the prior year primarily driven by NAND memory 1